Section 1 - CHEMICAL PRODUCT AND COMPANY IDENTIFICATION

PRODUCT NAME

JSR KRF TMX1135Y

NFPA

PRODUCT USE

Photoresist for integrated circuit production.

SYNONYMS

"photoresist integrated circuit production photsensitizer polyhydroxystyrene derivatives
solution", KRF-TMX-1135-Y

Section 2 - HAZARDS IDENTIFICATION

CANADIAN WHMIS SYMBOLS

EMERGENCY OVERVIEW

RISK

Irritating to respiratory system.
Risk of serious damage to eyes.
May cause harm to the unborn child.
HARMFUL - May cause lung damage if swallowed.
Flammable.

POTENTIAL HEALTH EFFECTS

ACUTE HEALTH EFFECTS

SWALLOWED

  Accidental ingestion of the material may be damaging to the health of the individual.  Swallowing of the liquid may cause aspiration into the lungs with the risk of chemical pneumonitis; serious consequences may result. (ICSC13733).  The main effects of simple esters are irritation, stupor and insensibility. Headache, drowsiness, dizziness, coma and behavioral changes may occur. Respiratory symptoms may include irritation, shortness of breath, rapid breathing, throat inflammation, bronchitis,  lung inflammation and pulmonary edema, sometimes delayed. Nausea, vomiting, diarrhea and cramps are observed. Liver and kidney damage may result from massive exposures.  HARMFUL - May cause lung damage if swallowed.  Central nervous system (CNS) depression may include general discomfort, symptoms of giddiness, headache, dizziness, nausea, anaesthetic effects, slowed reaction time, slurred speech and may progress to unconsciousness. Serious poisonings may result in respiratory depression and may be fatal.  

EYE

  If applied to the eyes, this material causes severe eye damage.  Risk of serious damage to eyes.  Irritating to eyes.  The material may produce severe irritation to the eye causing pronounced inflammation. Repeated or prolonged exposure to irritants may produce conjunctivitis.  

SKIN

  The material is not thought to produce adverse health effects or skin irritation following contact (as classified using animal models). Nevertheless, good hygiene practice requires that exposure be kept to a minimum and that suitable gloves be used in an occupational setting.  Entry into the blood-stream, through, for example, cuts, abrasions or lesions, may produce systemic injury with harmful effects. Examine the skin prior to the use of the material and ensure that any external damage is suitably protected.  

INHALED

  Inhalation may produce health damage*.  Inhalation of vapors or aerosols (mists, fumes), generated by the material during the course of normal handling, may be damaging to the health of the individual.  The material can cause respiratory irritation in some persons. The body's response to such irritation can cause further lung damage.  Inhalation of vapours may cause drowsiness and dizziness. This may be accompanied by narcosis, reduced alertness, loss of reflexes, lack of coordination and vertigo.  The main effects of simple esters are irritation, stupor and insensibility. Headache, drowsiness, dizziness, coma and behavioral changes may occur. Respiratory symptoms may include irritation, shortness of breath, rapid breathing, throat inflammation, bronchitis,  lung inflammation and pulmonary edema, sometimes delayed. Nausea, vomiting, diarrhea and cramps are observed. Liver and kidney damage may result from massive exposures.  If exposure to highly concentrated solvent atmosphere is prolonged this may lead to narcosis, unconsciousness, even coma and possible death.  Irritating to respiratory system.  

CHRONIC HEALTH EFFECTS

  Ample evidence exists, from results in experimentation, that developmental disorders are directly caused by human exposure to the material.  

  Limited evidence suggests that repeated or long-term occupational exposure may produce cumulative health effects involving organs or biochemical systems.  Asthma-like symptoms may continue for months or even years after exposure to the material ceases. This may be due to a non-allergenic condition known as reactive airways dysfunction syndrome (RADS) which can occur following exposure to high levels of highly irritating compound. Key criteria for the diagnosis of RADS include the absence of preceding respiratory disease, in a non-atopic individual, with abrupt onset of persistent asthma-like symptoms within minutes to hours of a documented exposure to the irritant. A reversible airflow pattern, on spirometry, with the presence of moderate to severe bronchial hyperreactivity on methacholine challenge testing and the lack of minimal lymphocytic inflammation, without eosinophilia, have also been included in the criteria for diagnosis of RADS. RADS (or asthma) following an irritating inhalation is an infrequent disorder with rates related to the concentration of and duration of exposure to the irritating substance. Industrial bronchitis, on the other hand, is a disorder that occurs as result of exposure due to high concentrations of irritating substance (often particulate in nature) and is completely reversible after exposure ceases. The disorder is characterised by dyspnea, cough and mucus production.  Chronic solvent inhalation exposures may result in nervous system impairment and liver and blood changes. [PATTYS].  Some glycol esters and their ethers cause wasting of the testicles, reproductive changes, infertility and changes to kidney function. Shorter chain compounds are more dangerous. Higher concentrations and prolonged exposure can cause blood in the urine.