Section 1 - CHEMICAL PRODUCT AND COMPANY IDENTIFICATION

PRODUCT NAME

JSR KRF M83Y (R & D USE ONLY)

NFPA

PRODUCT USE

Photoresist for integrated circuit production.

SYNONYMS

"Photosensitiser and polyhydroxystyrene derivatives solution", M-83-Y, M-83-Y,
"photoresist for integrated circuit production"

Section 2 - HAZARDS IDENTIFICATION

CANADIAN WHMIS SYMBOLS

EMERGENCY OVERVIEW

RISK

Irritating to respiratory system.
Risk of serious damage to eyes.
May cause harm to the unborn child.
HARMFUL - May cause lung damage if swallowed.
Flammable.

POTENTIAL HEALTH EFFECTS

ACUTE HEALTH EFFECTS

SWALLOWED

  Although ingestion is not thought to produce harmful effects, the material may still be damaging to the health of the individual following ingestion, especially where pre-  existing organ (e.g. liver, kidney) damage is evident. Present definitions of harmful or toxic substances are generally based on doses producing mortality (death) rather than those producing morbidity (disease, ill-health). Gastrointestinal tract discomfort may produce nausea and vomiting. In an occupational setting however, ingestion of insignificant quantities is not thought to be cause for concern.  Considered an unlikely route of entry in commercial/industrial environments.  Ingestion may result in nausea, pain, vomiting. Vomit entering the lungs by aspiration may cause potentially lethal chemical pneumonitis.  

EYE

  If applied to the eyes, this material causes severe eye damage.  The liquid may produce eye discomfort and is capable of causing temporary impairment of vision and/or transient eye inflammation, ulceration.  The material may produce severe irritation to the eye causing pronounced inflammation. Repeated or prolonged exposure to irritants may produce conjunctivitis.  

SKIN

  The material is not thought to produce adverse health effects or skin irritation following contact (as classified using animal models). Nevertheless, good hygiene practice requires that exposure be kept to a minimum and that suitable gloves be used in an occupational setting.  The material may accentuate any pre-existing dermatitis condition.  

INHALED

  Inhalation may produce health damage*.  If inhaled, this material can irritate the throat andlungs of some persons.  Inhalation hazard is increased at higher temperatures.  Acute effects from inhalation of high vapor concentrations may be chest and nasal irritation with coughing, sneezing, headache and even nausea.  If exposure to highly concentrated solvent atmosphere is prolonged this may lead to narcosis, unconsciousness, even coma and possible death.  

CHRONIC HEALTH EFFECTS

  Ample evidence exists, from results in experimentation, that developmental disorders are directly caused by human exposure to the material.  

  Principal routes of exposure are usually by inhalation of vapor and skin contact with the material.  Prolonged or continuous skin contact with the liquid may cause defatting with drying, cracking, irritation and dermatitis following.  Chronic solvent inhalation exposures may result in nervous system impairment and liver and blood changes. [PATTYS].  As with any chemical product, contact with unprotected bare skin; inhalation of vapor, mist or dust in work place atmosphere; or ingestion in any form, should be avoided by observing good occupational work practice.